Efficient and slurryless ultrasonic vibration assisted electrochemical mechanical polishing for 4H–SiC wafers

Development of Ultrasonic Vibration Assisted Polishing Machine for Micro Aspheric Die and Mold

Demands are increasing for micro axis-symmetric aspherical lenses to be installed in various optical devices. The micro glass lenses are generally molded by glass press process with micro aspheric ceramic molding dies or molds made of tungsten carbide or silicon carbide. These dies and molds are mostly ground with micro diamond wheels, but require additional finishing process as the size of the...

Laser Assisted Chemical Mechanical Polishing for Planarization

Ultrasonic Vibration Assisted Electro-Discharge Machining

An ultrasonic vibration has been superposed on the normal electrode movement to increase the flushing effect during a micro electro-discharge machining (EDM) process. A systematic study on the effects of ultrasonic vibration on the EDM performance for fabricating microholes in Nitinol has been completed. The introduction of ultrasonic vibration to the microEDM process has more than 60 times inc...

A novel approach of chemical mechanical polishing for cadmium zinc telluride wafers

A novel approach of chemical mechanical polishing (CMP) is developed for cadmium zinc telluride (CdZnTe or CZT) wafers. The approach uses environment-friendly slurry that consists of mainly silica, hydrogen peroxide, and citric acid. This is different from the previously reported slurries that are usually composed of strong acid, alkali, and bromine methanol, and are detrimental to the environm...

Highly Efficient Microwave-Assisted and Ultrasonic-Assisted Extraction

Various extraction techniques were applied in the extraction of the biologically active constituents. The methods employed were traditional maceration extraction, microwave-assisted extraction(MAE), and ultrasound extraction (UE). Compared to the maceration extraction, MAE and UE methods provided high extraction yield, requiring short time frames and less labour. Microwave irradiation is a prov...